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Study on Accelerating Voltage of SEM in Observation of Carbon Nanotube Surface

Carbon nanotubes (CNTs) have attracted increasing attention due to their superior physical and chemical properties such as their high electrical and thermal conductivity, great specific area, etc. Scanning electron microscopy on commercial CNTs was optimized. Based of Rayleigh level, the resolution of optical system was induced by substituting parameters of thermoelectric emission scanning electron microscope. The size of interaction range of electron-CNTs is evaluated by substituting parameters of CNTs into the equation evaluating size of Kanaya-Okayama range. Based on theoretical analytical results, the high voltage range is defined in fine structure observation of CNTs surface by thermoelectric emission scanning electron microscope. We selected the spot size as 1.5nm, the working distance as 4.3mm, and did the SEM measurement experiment changing the accelerating voltage. The effects of energy of the incident electron on the size of the electron-CNTs interaction range and the resolution of SEM were theoretically investigated. As a result, in case of microstructure observation of CNTs surface by using thermoelectric SEM, the most proper accelerating voltage was within 5~10kV. Through the experiments based on it, we found that the accelerating voltage of 7.5kV enables us to get the sharpest image of the microstructure of CNT surface. Then we compared theoretical results and experimental results. Theoretical results and experimental results were agreed well.

Scanning Electron Microscopy, Carbon Nanotube, Surface, Fine Structure, Accelerating Voltage

Nam Chol Yu, Il Man Pak. (2022). Study on Accelerating Voltage of SEM in Observation of Carbon Nanotube Surface. Nanoscience and Nanometrology, 8(1), 10-14.

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This article is an open access article distributed under the Creative Commons Attribution License ( which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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